2A Thin Films Please provide complete correct mathematical a

2A. Thin Films. Please provide complete, correct, mathematical and scientific solution done on computer or by hand. This is all the information provided. Thank you very much.

2. (50 pts) Film Epitaxy a. Explain how RHEED (Reflection High Energy Electron Diffraction) tells in situ the thickness of film being d thickness of film being deposited.

Solution

A method and system for real-time, in-situ measurement of a film being deposited onto a surface of a wafer in a tool during semiconductor, optical component and electro-optic component processing and manufacturing. The method and system include real-time, in-situ detecting and analyzing radiation within the tool which is reflected off a wafer surface and subsequently diffusely reflected off internal roughened surfaces of the processing chamber. The emitted radiation may be derived from the plasma within the chamber, or alternatively, an external energy source. In detecting and analyzing the radiation reflected off the internal surfaces of the processing tool, the instant method and system monitors the deposition process of the film and automatically controls the deposition of such film in response to the measurements taken.