In a sputtering target the cathode is capacitivelycoupled to

In a sputtering target the cathode is capacitively-coupled to the RF supply. Question What would happen if it was directly connected to the supply?

Solution

In general the RF sputtering is used to sputter semiconductor or insulator materials. If the cathode is directly connected to the supply then due to large heating the resistance will become high and the current will not generate. This will leads to stop the plasma formation. No plasma means the sputtering will not occur.