Design an electrostatic actuator in a 1 mm x 1 mm area to ac

Design an electrostatic actuator in a 1 mm x 1 mm area to achieve high work output (force * displacement). Assume that you are working in an SOI process with a 40 ?m thick structure layer and you are using a single mask to etch the structure layer of the SOI (no multi-height structures or backside etch). Assume a minimum feature size of 3 ?m (any flexures must be at least 3 ?m wide and gaps must be a minimum of 3 ?m as well). Provide an image of the layout (indicating where you would apply an electrical input) as well as calculations indicating estimates of blocked force and displacement for your actuator (depending on the actuator design, estimates might be somewhat challenging so feel free to simplify).

Design an electrostatic actuator in a 1 mmx 1 mm area to achieve high work output (force * displacement) with a 40 m thick structure layer and you are using a single mask to etch the structure layer of the sol (no multi-height structures or backside etch). Assume a minimum feature size of 3 m (any flexures must be at least 3 m wide and gaps must be a minimum of 3 m as well). Provide an image of the layout (indicating where you would apply an electrical input) as well as calculations indicating estimates of blocked force and displacement for your actuator (depending on the actuator design, estimates might be somewhat challenging so feel free to simplify) Assume that you are working in an SOI process

Solution

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