A machine drops a wafer and is set to be about 600 nm with a

A machine drops a wafer and is set to be about 600 nm with a process time of 1 minute. Currently the measurements on the wafer are 500 nm after 1 min. What would you do?

I will stop the machine and call servies expert to contamination and difect ditection.

Becouse wafers have the pottential to distroy the divice functionality.the feater size is constantly decreesing.