Homework Soursea circular object has 011 is the direction in the surface pl
a circular object has [011] is the direction in the surface plane normal to the major flat when the when the surface of depicted Si wafer is a (100) plane. To construct particular device structure a parallel set of grooves must be etched in the (100) surface plane along [010] direction. Make a sketch indicating how the grooves are to be oriented on wafer\'s surface. Explain how you arrived at your sketch
Solution
by considering the given direction of the grooves
lie between 011 to 100
pattern obtained is circular
010 at the centre
![a circular object has [011] is the direction in the surface plane normal to the major flat when the when the surface of depicted Si wafer is a (100) plane. To c](/WebImages/5/a-circular-object-has-011-is-the-direction-in-the-surface-pl-983428-1761505029-0.webp "a circular object has [011] is the direction in the surface plane normal to the major flat when the when the surface of depicted Si wafer is a (100) plane. To c")
