1 Engineers decided to improve the process They chose to run

1

Engineers decided to improve the process. They chose to run a designed experiment on the process to improve hard bake process. Specifically, they wanted to investigate the effect of four factors on the resistivity (measured in ohm meters) of a silicon wafer. The engineers ran what is called a Designed Experiment. They varied all possible combinations of the four factors each set at a high and low level. The levels are coded in the data as 1 for \"high\" and -1 for \"low\". To vary all possible combinations of 4 factors, the engineers had to do 24 = 16 separate experiments.

Using Minitab and the file Resistivity_1.MTW(Table Shown Above), answer the following questions:

1. Make a scatterplot of each factor and the response (resistivity). Which of the four factors appear to have an impact on resistivity? For those factors, describe the relationship. (Note: since each factor only has two levels, these scatterplots should look a bit different than what you\'re used to seeing.)

-1 -1 -1 1 30.307
-1 -1 1 1 25.917
-1 1 -1 1 30.614
-1 1 1 -1 38.839

1

1 1 1 39.018
1 1 1 -1 46.887
1 -1 1 1 40.797
-1 1 1 1 31.992
1 -1 1 -1 46.462
1 1 -1 1 38.639
-1 1 -1 -1 37.504
1 -1 -1 1 35.447
-1 -1 -1 -1 34.287
1 -1 -1 -1 45.145
1 1 -1 -1 44.892
-1 -1 1 -1 34.981

Solution

1 Engineers decided to improve the process. They chose to run a designed experiment on the process to improve hard bake process. Specifically, they wanted to in

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